System and method for measuring tool performance
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United States of America Patent
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Aug 17, 2010
Grant Date -
Apr 17, 2008
app pub date -
Oct 12, 2006
filing date -
Oct 12, 2006
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Abstract
A system and method for measuring tool performance of a multi-path cluster semiconductor fabrication tool. The system comprises a status data unit for receiving up or down status data for each element of the tool for respective operational time periods; a performance value assignment unit for assigning a performance value to the tool for each time period based on the status data of the elements during said each time period; and an operational uptime unit for determining an operational uptime for a period covering the time periods of the tool based on multiplying the respective time periods with the corresponding assigned performance values.
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