Developing apparatus, developing processing method, developing processing program, and computer readable recording medium recording the program
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United States of America Patent
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Aug 17, 2010
Grant Date -
Nov 1, 2007
app pub date -
Apr 25, 2007
filing date -
Apr 26, 2006
priority date (Note) -
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Abstract
A developing apparatus, a developing processing method, a developing processing program, and a computer readable recording medium recording the program, which can reduce the consumption amount of the developing solution and the developing processing time irrespective of the type of resist materials or the shape of resist patterns, are provided. A step of horizontally holding a substrate and rotating the substrate around a vertical axis at a prescribed rotation rate, and a step of intermittently supplying a developing solution to a center of the substrate from a discharge port of a developing solution nozzle arranged opposing to the surface of the substrate are executed. In the step of intermittently supplying the developing solution to the center of the substrate, an intermittence time and a substrate rotation rate in the intermittence time are set to prevent the developing solution supplied to the substrate from drying.
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