Metal comb structures, methods for their fabrication and failure analysis
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United States of America Patent
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Aug 10, 2010
Grant Date -
Sep 11, 2008
app pub date -
Mar 5, 2007
filing date -
Mar 5, 2007
priority date (Note) -
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Abstract
The present disclosure relates to a metal comb structure including a first comb which includes a first set of metal fingers each of the metal fingers being connected at one end thereof by a connecting member from which the metal fingers extend. The metal comb structure also includes a second comb which includes a first set of metal fingers inter-digitated with the metal fingers of the first comb, a first set of vias associated with the metal fingers of the second comb and a connecting member connected to the vias thereby connecting the metal fingers of the second comb. The vias extend from the metal fingers of the second comb such that the connecting member of the second comb is located outside a plane defined by the metal fingers of the first and second combs.
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