Method of manufacturing a micro-mechanical element
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United States of America Patent
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Aug 10, 2010
Grant Date -
Mar 22, 2007
app pub date -
Apr 26, 2004
filing date -
Apr 25, 2003
priority date (Note) -
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Abstract
A method of manufacturing a micromechanical element wherein the method comprises the steps of providing a layer of base material, applying at least one at least partly sacrificial layer of an etchable material, patterning the at least partly sacrificial layer, to define at least a portion of the shape of the element, applying at least one structural layer of a mechanical material, patterning the structural layer to form at least a portion of the element, and removing at least partly the patterned at least partly sacrificial layer to release partly free the element. The mechanical material is selected from the group of conductive materials.
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