Resist composition and patterning process

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United States of America Patent

PATENT NO 7771914
APP PUB NO 20080090172A1
SERIAL NO

11872952

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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is alkylene, 0≦(a-1)<1, 0≦(a-2)<1, 0≦(a-3)<1, 0<(a-1)+(a-2)+(a-3)<1, 0

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Patent Owner(s)

Patent OwnerAddress
SHIN-ETSU CHEMICAL CO LTDTOKYO TOKYO METROPOLIS

International Classification(s)

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  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Harada, Yuji Joetsu, JP 163 1999
Hatakeyama, Jun Joetsu, JP 692 7607
Kusaki, Wataru Joetsu, JP 18 626
Yoshihara, Takao Joetsu, JP 15 627

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