Acceleration insensitive pressure sensor
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United States of America Patent
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Aug 10, 2010
Grant Date -
Jul 31, 2008
app pub date -
Jun 25, 2007
filing date -
Oct 18, 2004
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A pressure sensor for sensing a fluid pressure in a high acceleration environment. The sensor has a non-planar membrane between fluid at a reference pressure and fluid at the pressure to be sensed, such that the non-planar membrane deflects due to pressure differentials between the reference pressure and the fluid pressure. The deflection is converted into an output signal indicative of the fluid pressure by associated circuitry. By keeping the area of the membrane exposed to the fluid in the chamber to less than 0.1 grams, the acceleration forces have minimal affect on the amount that membrane flexes.
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