Substrate processing apparatus and substrate processing method

United States of America Patent

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Aug 3, 2010
Grant Date
Oct 5, 2006
app pub date
Mar 27, 2006
filing date
Mar 29, 2005

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Expired

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and which is faster than said first speed.

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Patent Owner(s)

Patent Owner	Address
DAINIPPON SCREEN MFG CO LTD	KYOTO JAPAN KYOTO

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B08B:CLEANING IN GENERAL; PREVENTION OF FOULING IN GENE....

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Inventor Name	Address	# of filed Patents	Total Citations
Miya, Katsuhiko	Kyoto, JP	59	868

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Substrate processing apparatus and substrate processing method

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United States of America Patent

11397814

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PATENT NO	7767026
APP PUB NO	20060219264A1
SERIAL NO	11397814
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity Expired	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
August 03, 2010	US,7767026,B2 US7767026B2	GRANTED PATENT AS SECOND PUBLICATION
October 05, 2006	US,20060219264,A1 US20060219264A1	FIRST PUBLISHED PATENT APPLICATION

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11397814

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