Methods for fabricating optical microstructures using a cylindrical platform and a rastered radiation beam
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United States of America Patent
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Jul 27, 2010
Grant Date -
Dec 7, 2006
app pub date -
Aug 17, 2006
filing date -
Sep 11, 2003
priority date (Note) -
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Abstract
Optical microstructures, such as microlenses, are fabricated by rotating a cylindrical platform that includes a radiation sensitive layer thereon, about its axis, while simultaneously axially rastering a laser beam across at least a portion of the radiation sensitive layer. The cylindrical platform is also simultaneously translated axially while it is being rotated. The amplitude of the laser beam is continuously varied while rastering. The optical microstructures that are imaged in the radiation sensitive layer can be developed to provide a master for replicating a microlenses.
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