MEMS thermal actuator and method of manufacture
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United States of America Patent
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Jul 20, 2010
Grant Date -
Jul 16, 2009
app pub date -
Mar 10, 2009
filing date -
Feb 14, 2007
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A separated MEMS thermal actuator is disclosed which is largely insensitive to creep in the cantilevered beams of the thermal actuator. In the separated MEMS thermal actuator, a inlaid cantilevered drive beam formed in the same plane, but separated from a passive beam by a small gap. Because the inlaid cantilevered drive beam and the passive beam are not directly coupled, any changes in the quiescent position of the inlaid cantilevered drive beam may not be transmitted to the passive beam, if the magnitude of the changes are less than the size of the gap.
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