Antireflective coating compositions

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United States of America Patent

PATENT NO 7754414
APP PUB NO 20080014529A1
SERIAL NO

11456868

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Antireflective coating compositions with reduced outgassing are disclosed.

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Patent Owner(s)

Patent OwnerAddress
AZ ELECTRONIC MATERIALS USA CORP70 MEISTER AVENUE SOMERVILLE NJ 08876

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Oberlander, Joseph E Phillipsburg, US 29 512

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