Extractor for an microcolumn, an alignment method for an extractor aperture to an electron emitter, and a measuring method and an alignment method using thereof
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United States of America Patent
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Jul 6, 2010
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app pub date -
Dec 30, 2003
filing date -
Dec 30, 2002
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Abstract
The present invention provides a new extractor for a micro-column and an alignment method of the aperture of the extractor and an electron emitter for a micro-column. Further, the present invention provides a measuring system, a method for measuring, and an alignment method using the principle of the alignment.
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