Method for fabricating lateral-moving micromachined thermal bimorph
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United States of America Patent
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Jul 6, 2010
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app pub date -
Jan 22, 2009
filing date -
Oct 15, 2004
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Abstract
A method of making a Lateral-Moving Micromachined Thermal Bimorph which provides the capability of achieving in-plane thermally-induced motion on a microchip, as opposed to the much more common out-of-plane, or vertical, motion seen in many devices. The present invention employs a novel fabrication process to allow the fabrication of a lateral bimorph in a fundamentally planar set of processes. In addition, the invention incorporates special design features that allow the bimorph to maintain material interfaces.
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