Scatterometry multi-structure shape definition with multi-periodicity
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United States of America Patent
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Jun 29, 2010
Grant Date -
Sep 20, 2007
app pub date -
Mar 8, 2007
filing date -
Mar 17, 2006
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Abstract
A modeling approach is disclosed which addresses samples with different regions where the structures exhibit different periodicities. In this approach, a first partial model is generated which defines the shape, material properties and periodicity of the first region. In addition, a second partial model is generated defining the shape, material properties and periodicity of the second region. These two partial models are then merged into a combined model. When optimizing the combined model, the shape and material properties of the first and second models are independently adjusted. The optical responses of the model with differing shapes and material properties are-calculated and compared to a physical sample. This process is iteratively carried out to derive a final combined model that corresponds to a physical sample.
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