Plasma generator having a power supply with multiple leakage flux coupled transformers
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United States of America Patent
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Jun 29, 2010
Grant Date -
Oct 30, 2008
app pub date -
Apr 27, 2007
filing date -
Apr 27, 2007
priority date (Note) -
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Abstract
A plasma generating apparatus includes a plurality of discharge cells in which a gas is excited by a high frequency excitation signal produced at an inverter. Each of a plurality of transformers couples the excitation signal from the inverter to one of the discharge cells, thereby forming a separate resonant circuit that has a resonant frequency. A gap in the transformer core creates a stray magnetic field outside the transformer. The plurality of transformers are in close proximity to each other so that the stray magnetic field from one transformer is coupled to at least one other transformer. Coupling the stray magnetic fields between transformers results in each resonant circuit resonating at the same frequency.
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