Method of fabricating active layer of thin film transistor

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 7745267
APP PUB NO 20080057631A1
SERIAL NO

11614977

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Abstract

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A manufacturing method of an active layer of a thin film transistor is provided. The method includes following steps. First a substrate is provided, and a semiconductor precursor solution is then prepared through a liquid process. Thereafter, the semiconductor precursor solution is provided on the substrate to form a semiconductor precursor thin film. After that, a light source is used to irradiate the semiconductor precursor thin film to remove residual solvent and allow the semiconductor precursor thin film to produce semiconductor property, so as to form a semiconductor active layer.

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Patent Owner(s)

Patent OwnerAddress
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE195 SEC 4 CHUNG HSING RD CHUTUNG HSINCHU 310401
AU OPTRONICS CORPORATIONHSIN-CHU
HANNSTAR DISPLAY CORPORATION4F NO 15 LN 168 XING SHAN RD NEIHU DIST TAIPEI CITY
CHUNGHWA PICTURE TUBES LTD1127 HEPING RD BADE CITY TAOYUAN
CHI MEI OPTOELECTRONICS CORPORATION6F NO 3 SEC 1 HUANSI RD SINSHIH TOWNSHIP TAINAN SCIENCE-BASED INDUSTRIAL PARK TAINAN COUNTY 744
TAIWAN TFT LCD ASSOCIATIONRM 282 BLDG 15 195 SEC 4 CHUNG HSING RD CHUTUNG HSINCHU
TPO DISPLAYS CORPNO 12 KE JUNG RD SCIENCE-BASED INDUSTRIAL PARK CHU-NAN MIAO-LI COUNTY 350

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cheng, Hsiang-Yuan Taipei, TW 16 71
Chiang, Shin-Chuan Taipei, TW 12 49
Chuang, Bor-Chuan Tainan County, TW 6 37
Lai, Shih-Hsiang Taipei County, TW 4 35
Yu, Chin-Chih Hsinchu, TW 3 32

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