Multi-beam modulator for a particle beam and use of the multi-beam modulator for the maskless structuring of a substrate
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United States of America Patent
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Jun 22, 2010
Grant Date -
Jun 5, 2008
app pub date -
Oct 25, 2005
filing date -
Nov 3, 2004
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Abstract
The invention discloses a multibeam modulator which generates a plurality of individual beams from a particle beam. The particle beam illuminates the multibeam modulator at least partially over its surface. The multibeam modulator comprises a plurality of aperture groups composed of aperture row groups. The totality of all aperture rows defines a matrix of m×n cells, where m cells form a row, and k openings are formed in each row. The density of openings within a row is inhomogeneously distributed.
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