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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
NATIONAL INSTITUTES OF NATURAL SCIENCES	21-1 OSAWA 2-CHOME MITAKA-SHI TOKYO 181-8588

International Classification(s)

• G01B:MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIME....

• [Classification Symbol]

• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Hayano, Yutaka	Tokyo, JP	6	46
Nishikawa, Jun	Tokyo, JP	52	556

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
June 08, 2010	US,7733500,B2   US7733500B2	GRANTED PATENT AS SECOND PUBLICATION
June 25, 2009	US,20090161115,A1   US20090161115A1	FIRST PUBLISHED PATENT APPLICATION

Full Text

US Patent No: 7733500

Wavefront sensor with optical path difference compensation

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