Reflective loop system producing incoherent radiation

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United States of America Patent

PATENT NO 7728954
APP PUB NO 20070279611A1
SERIAL NO

11447289

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Abstract

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A system and method are used to form incoherent beams from a coherent beam. A system comprises a source of radiation and a reflective loop system. The source of radiation produces a coherent or partially coherent beam. The reflective loop system received the partially coherent beam and reflects the partially coherent beam through a loop, or alternatively through non-overlapping loops, to form an incoherent beam.

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Patent Owner(s)

Patent OwnerAddress
ASML NETHERLANDS B VP O BOX 324 VELDHOVEN 5500 AH
DAINIPPON SCREEN MFG CO LTDKYOTO JAPAN KYOTO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Baselmans, Johannes Jacobus Matheus Oirschot, NL 163 4062
Ueyama, Kenji Kyoto, JP 14 208

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