Electron source manufacturing method
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United States of America Patent
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May 25, 2010
Grant Date -
Jan 22, 2009
app pub date -
Jan 13, 2006
filing date -
Jan 14, 2005
priority date (Note) -
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Abstract
An electron source excellent in the uniformity in current emission distribution is provided certainly and at a low cost.A process for producing an electron source having an electron emitting portion at one end of a rod, which comprises a step of forming the electron emitting portion by machining, and a step of removing a damaged layer at the surface of the formed electron emitting portion by chemical polishing or electrolytic polishing.
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