Spectrometer for surface analysis and method therefor
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United States of America Patent
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May 11, 2010
Grant Date -
May 24, 2007
app pub date -
Oct 27, 2006
filing date -
Oct 28, 2005
priority date (Note) -
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Abstract
A spectrometer (10) for sample surface analysis by irradiation of the surface by primary particles and a corresponding method of surface analysis spectroscopy. The spectrometer (10) provides sample viewing and secondary charged particle collection substantially normal to the sample surface. A collection chamber (22) comprises a secondary charged particle lens arrangement (20) to focus the emitted particles in a downstream direction along a first normal axis (24) and thereby to define a charged particle optical crossover location (25); and a light-reflecting optical element (50) downstream of the lens arrangement and arranged to receive image light (41) and reflect it away from a second normal axis (42) for providing a viewable image of the surface. The optical element (50) is positioned at, or near to, the crossover location (25) and comprises an opening (52) therethrough, such that the focused particles pass through the opening for downstream spectroscopic analysis substantially without obstruction by the optical element.
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