System, method and apparatus for multi-beam lithography including a dispenser cathode for homogeneous electron emission
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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May 4, 2010
Grant Date -
Aug 9, 2007
app pub date -
Jan 5, 2007
filing date -
Feb 14, 2003
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A dispenser cathode which comprises an emission surface, a reservoir for material releasing, when heated, work-function-lowering particles, and at least one passage for allowing diffusion of work-function-lowering particles from said reservoir to said emission surface, said emission surface comprising at least one emission area and at least one non-emission area covered with emission-suppressing material and surrounding each emission area, said non-emission area comprising at least one passage connecting said reservoir with said non-emission area and debouching within a diffusion length distance from an emission area for allowing diffusion of work-function-lowering particles from said reservoir to said emission area.
First Claim
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- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
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ASML NETHERLANDS B V | 5500 AH VELDHOVEN |
International Classification(s)
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
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Kruit, Pieter | Rotterdam, NL | 103 | 1318 |
# of filed Patents : 103 Total Citations : 1318 | |||
Steenbrink, Stijn Willem Herman Karel | Delft, NL | 34 | 330 |
# of filed Patents : 34 Total Citations : 330 |
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Patent Citation Ranking
- 2 Citation Count
- H01J Class
- 4.16 % this patent is cited more than
- 15 Age
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Maintenance Fees
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Fee | Large entity fee | small entity fee | micro entity fee |
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Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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Sep 20, 2017 | STCF | INFORMATION ON STATUS: PATENT GRANT | free format text: PATENTED CASE |
Feb 09, 2017 | P | Published | |
Jul 26, 2016 | F | Filing | |
Jun 28, 2016 | AS | ASSIGNMENT | free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:WINKLER, PASCAL;BORN, JEAN-JACQUES;REEL/FRAME:039262/0038 Owner name: ETA SA MANUFACTURE HORLOGERE SUISSE, SWITZERLAND Effective Date: Jun 28, 2016 |
Aug 04, 2015 | PD | Priority Date |

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