Scanning probe microscope with automatic probe replacement function
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United States of America Patent
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May 4, 2010
Grant Date -
Jun 26, 2008
app pub date -
Oct 15, 2007
filing date -
Dec 21, 2006
priority date (Note) -
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Abstract
Provided is a scanning probe microscope (SPM), a probe of which can be automatically replaced and the replacement probe can be attached onto an exact position. The SPM includes a first scanner that has a carrier holder, and changes a position of the carrier holder in a straight line; a second scanner changing a position of a sample on a plane; and a tray being able to store a spare carrier and a spare probe attached to the spare carrier. The carrier holder includes a plurality of protrusions.
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