Three-dimensional shape measuring method and apparatus
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United States of America Patent
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Apr 20, 2010
Grant Date -
May 15, 2008
app pub date -
Dec 22, 2005
filing date -
Dec 22, 2004
priority date (Note) -
Expired
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Abstract
Three-dimensional shape measuring instrument (white interferometer) for measuring the three-dimensional shape of an object to be measured by using white interference fringes, which detects the position where the amplitude of the white interference fringes takes on a maximum value with high accuracy in a short calculation processing time. An envelope distribution of the amplitude of the white interference fringes produced by the interference between the returning light from a reference mirror (6) and the returning light from an object (7) to be measured is determined, and an approximate position where the contrast of the white interference fringes is the highest is determined using this envelope distribution. The interference fringes of two or more different spectrum band components included in the white interference fringes are extracted, and the positions which are near the determined approximate position and at which the phases of the interference fringes of the different spectrum band components take on the same values are determined.
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