MEMS device formed inside hermetic chamber having getter film
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United States of America Patent
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Apr 13, 2010
Grant Date -
Jan 1, 2009
app pub date -
Jun 26, 2008
filing date -
Jun 27, 2007
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A MEMS device including a getter film formed inside a hermetic chamber provides stable performance of the MEMS device by electrically stabilizing the getter film. The MEMS device includes a movable portion and a fixed portion formed inside the hermetic chamber. The hermetic chamber is formed by a base material of the MEMS device and glass substrates and having a cavity and cavities made therein. A part of any continuous getter film formed inside the hermetic chamber connects to only one of any one or a plurality of predetermined electrical potentials of the fixed portion and a ground potential of the fixed portion through the base material of the MEMS device.
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