Apparatus for transporting substrates under a controlled atmosphere
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United States of America Patent
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Apr 13, 2010
Grant Date -
Oct 27, 2005
app pub date -
Apr 20, 2005
filing date -
Apr 21, 2004
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Apparatus of the invention for transporting substrates (3) comprises a mini-environment enclosure (1) that is movable and that can be coupled to a conditioning station (22). The mini-environment enclosure (1) includes a micropump (12) whose inlet is connected to an inside cavity (2) that is to contain the substrate (3) to be transported. An energy supply (16) is also provided in the mini-environment enclosure (1) to power the micropump (12). The mini-environment enclosure (1) comprises a peripheral shell (4) open to two opposite main faces (5, 6), and including a closable side opening (7). A first main wall (8) is fitted to close the first main face (5) in leaktight manner. A second main wall (9) is fitted and secured to close the second main face (6) in leaktight manner. The first and second main walls are disposed in planes parallel to the plane containing the substrate. This makes it easier to manufacture the mini-environment enclosure, while also providing modularity so that the main walls (8, 9) can have functions that are different and can be interchanged.
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