Inspection method and inspection apparatus for inspecting electrical characteristics of inspection object

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Mar 30, 2010
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Jan 10, 2008
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Jun 9, 2003

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Abstract

At least one pair of electrode formed on a mounting surface of a stage is in contact with a conductive layer formed on a first surface of an inspection object, and an electrical path is formed between the both by using a fritting phenomenon.

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Patent Owner(s)

Patent Owner	Address
TOKYO ELECTRON LIMITED	SHINJUKU-KU TOKYO

International Classification(s)

G01R:MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC V....

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Inventor Name	Address	# of filed Patents	Total Citations
Itoh, Toshihiro	1-170-4-201, Yayoi-cho, Inage-ku	18	129
Kataoka, Kenichi	Tokyo, JP	94	863
Komatsu, Shigekazu	Nirasaki, JP	29	311
Suga, Tadatomo	3-6-3, Higashinakano, Nakano-ku	51	1579

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Inspection method and inspection apparatus for inspecting electrical characteristics of inspection object

Number of patents in Portfolio can not be more than 2000

United States of America Patent

12007403

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US Family Size	Non-US Coverage
Patent Longevity	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
March 30, 2010	US,7688088,B2 US7688088B2	GRANTED PATENT AS SECOND PUBLICATION
July 24, 2008	US,20080174325,A1 US20080174325A1	FIRST PUBLISHED PATENT APPLICATION

PATENT NO	7688088
SERIAL NO	12007403
DOCKET NO

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12007403

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