Protection capsule for MEMS devices

United States of America Patent

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Mar 23, 2010
Grant Date
Oct 4, 2007
app pub date
Mar 16, 2007
filing date
Mar 21, 2006

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Abstract

A method of making a MEMS device is disclosed wherein anhydrous HF exposed silicon nitride is used as a temporary adhesion layer to permit the transfer of a layer from a carrier substrate to a receiving substrate.

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Patent Owner(s)

Patent Owner	Address
TELEDYNE DIGITAL IMAGING INC	1049 CAMINO DOS RIOS THOUSAND OAKS CA 91360

International Classification(s)

H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....

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[Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Archambault, Sylvie	Granby, CA	2	42
Giard, Veronique	Canton de Granby, CA	1	35
Ignatiuk, Paul	Westmount, CA	1	35
Ouellet, Luc	Granby, CA	68	2204

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Protection capsule for MEMS devices

Number of patents in Portfolio can not be more than 2000

United States of America Patent

11687287

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PATENT NO	7682860
APP PUB NO	20070231943A1
SERIAL NO	11687287
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
March 23, 2010	US,7682860,B2 US7682860B2	GRANTED PATENT AS SECOND PUBLICATION
October 04, 2007	US,20070231943,A1 US20070231943A1	FIRST PUBLISHED PATENT APPLICATION

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11687287

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Abstract

First Claim

Family

Patent Owner(s)

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Maintenance Fees

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