Plasma generation apparatus and work processing apparatus
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United States of America Patent
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Mar 23, 2010
Grant Date -
Aug 23, 2007
app pub date -
Feb 6, 2007
filing date -
Feb 20, 2006
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A plasma generation apparatus is provided which includes: an apparatus main body which has a microwave generation section which generates a microwave and a plasma generation nozzle which generates and emits a plasma gas based on the energy of the microwave; a microwave detection unit which detects a microwave leaking from the apparatus main body; and a control section which stops the microwave generation section from generating a microwave if the detection unit detects a microwave.
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