Image processing method, substrate inspection method, substrate inspection apparatus and method of generating substrate inspection data
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United States of America Patent
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Mar 16, 2010
Grant Date -
Jun 29, 2006
app pub date -
Dec 22, 2005
filing date -
Dec 27, 2004
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A color image as a combination of color data corresponding to a plural n-number of different hues is processed by extracting a target object from the image and carrying out a specified image processing. A reference image is obtained in the absence of the target object. Color data corresponding to specified less than n of the different hues are considered and difference in the degree of intensity of the considered color data relative to the combination of color data corresponding to n different hues between each pixel of the target image containing the target object and a corresponding pixel on the reference image are extracted. Pixels for which the extracted difference is greater than a specified threshold value and is in a specified direction are extracted. An image area formed by the extracted pixels are recognized as the target object.
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