Method of fabricating a bottle trench and a bottle trench capacitor
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United States of America Patent
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Mar 2, 2010
Grant Date -
Oct 2, 2008
app pub date -
Feb 20, 2008
filing date -
Nov 17, 2004
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A method of fabricating a bottle trench and a bottle trench capacitor. The method including: providing a substrate; forming a trench in the substrate, the trench having sidewalls and a bottom, the trench having an upper region adjacent to a top surface of the substrate and a lower region adjacent to the bottom of the trench; forming an oxidized layer of the substrate in the bottom region of the trench; and removing the oxidized layer of the substrate from the bottom region of the trench, a cross-sectional area of the lower region of the trench greater than a cross-sectional area of the upper region of the trench.
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