Treatment for reduction of line edge roughness
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Mar 2, 2010
Issued Date -
N/A
app pub date -
Mar 6, 2006
filing date -
Mar 6, 2006
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A method for reducing line edge roughness (LER) in a layer of photoresist is provided. In accordance with the method, a layer of photoresist is applied to a substrate. The layer of photoresist is then patterned and annealed in an atmosphere comprising at least one gas selected from the group consisting of hydrogen, nitrogen and fluorine-containing materials. Preferably, the anneal is performed after patterning the photoresist, but either immediately after, or subsequent to, the trim.
First Claim
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- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
SHENZHEN XINGUODU TECHNOLOGY CO LTD | 17TH FLOOR JINSONG MANSION TERRA INDUSTRIAL & TRADE PARK FUTIAN SHENZHEN |
International Classification(s)

- 2006 Application Filing Year
- G03F Class
- 1184 Applications Filed
- 649 Patents Issued To-Date
- 54.82 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Cobb, Jonathan L | Austin, US | 4 | 38 |
# of filed Patents : 4 Total Citations : 38 | |||
Darlington, William D | Austin, US | 2 | 13 |
# of filed Patents : 2 Total Citations : 13 | |||
Fisher, Brian J | Austin, US | 3 | 10 |
# of filed Patents : 3 Total Citations : 10 | |||
Hall, Mark D | Austin, US | 192 | 2199 |
# of filed Patents : 192 Total Citations : 2199 | |||
Shen, Jinmiao James | Austin, US | 1 | 7 |
# of filed Patents : 1 Total Citations : 7 | |||
Sheth, Vikas R | Austin, US | 3 | 9 |
# of filed Patents : 3 Total Citations : 9 | |||
Shroff, Mehul D | Austin, US | 117 | 1313 |
# of filed Patents : 117 Total Citations : 1313 | |||
Vasek, James E | Austin, US | 5 | 21 |
# of filed Patents : 5 Total Citations : 21 |
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Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
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Fee | Large entity fee | small entity fee | micro entity fee |
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Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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