Importance

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Abstract

To provide a filter test apparatus that can easily and efficiently test parallel filters in a clean room, a plurality of filters for purifying air supplied into the room are disposed in parallel, and a moving frame oriented along the exit surfaces of a filter group is disposed in the clean room, in which the exit surfaces of the filter group are used as the ceiling surfaces or side surfaces of the room, so as to allow movement in the direction along the exit surfaces of the filter group in a direction orthogonal to the longitudinal direction of the moving frame. The moving frame is disposed so as to span opposing room walls and in a position near the exit surfaces of the filter group in the room. A filter test device is movably mounted on the moving frame in the longitudinal direction of the moving frame.

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First Claim