Method, system and medium for controlling manufacturing process using adaptive models based on empirical data

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United States of America Patent

PATENT NO 7668702
APP PUB NO 20040015335A1
SERIAL NO

10377654

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Abstract

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A method, system, and medium of modeling and/or for controlling a manufacturing process is disclosed. The method includes the steps of identifying one or more input parameters that cause a change in output characteristics, defining global nodes using estimated maximum and minimum values of the input parameters, and defining a mathematical equation that calculates a predicted output characteristic for each node. The method also includes the steps of receiving at least one empirical data point having one or more input parameter values and at least one empirical output value and adjusting the predicted output values at the nodes based on a difference between the at least one empirical output value and the predicted output characteristic calculated using the mathematical equation based on the one or more input parameter values.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS ISRAEL LTD9 OPPENHEIMER STREET PARK RABIN REHOVOT 7670109

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Entin, Efim Jerusalem, IL 7 133
Fisher, Yossi Jerusalem, IL 13 223
Hartman, Jehuda Rehovot, IL 15 570
Kokotov, Yuri Maaleh Adumim, IL 18 322
Sarfaty, Moshe Cupertino, US 32 1023
Schwarm, Alexander T Austin, US 35 1146
Seror, Jacques Jerusalem, IL 7 166
Shanmugasundram, Arulkumar P Sunnyvale, US 18 707

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