Stress isolated pressure sensing die, sensor assembly inluding said die and methods for manufacturing said die and said assembly
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United States of America Patent
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Feb 16, 2010
Grant Date -
Jan 24, 2008
app pub date -
Sep 25, 2007
filing date -
Feb 27, 2006
priority date (Note) -
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Abstract
wherein the pedestal is a composite pedestal comprising top and bottom platforms connected by at least one small link having a mean cross-section smaller than the cross-section of the top platform, said small link isolating at least some of the stresses, produced by the mounting of the pressure sensing die on the base, from said deflectable pressure sensing diaphragm.
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