Capped and chambered pressure sensor
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United States of America Patent
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Jan 12, 2010
Grant Date -
Dec 27, 2007
app pub date -
Jul 29, 2007
filing date -
Oct 18, 2004
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The present invention relates to a pressure sensor. The pressure sensor includes a substrate assembly. The substrate assembly defines closed channels and includes a conductive layer. A conductive membrane extends from the substrate assembly and is spaced from the conductive layer. The conductive membrane defines a plurality of apertures. A cap extends from the substrate assembly to cover the membrane.
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