Scanning probe microscope capable of measuring samples having overhang structure
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United States of America Patent
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Jan 5, 2010
Grant Date -
Apr 3, 2008
app pub date -
Nov 17, 2006
filing date -
Sep 29, 2006
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Abstract
Provided is a scanning probe microscope capable of precisely analyzing characteristics of samples having an overhang surface structure. The scanning probe microscope comprises a first probe, a first scanner changing a position of the first probe along a straight line, and a second scanner changing a position of a sample in a plane, wherein the straight line in which the position of the first probe is changed by using the first scanner is non-perpendicular to the plane in which the position of the sample is changed by using the second scanner.
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