Probe card needle cleaning frequency optimization
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United States of America Patent
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Jan 5, 2010
Grant Date -
Jul 6, 2006
app pub date -
Feb 5, 2003
filing date -
Feb 5, 2003
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A system and method for optimizing cleaning of a probe card including using the probe card to test the functionality of dies on a wafer, when a die fails the probe test, and the probe reports failure to contact the pads of the die, checking the resistance of the probe needles, and if the resistance of a probe needle is greater than a predetermined value triggering probe needle cleaning.
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