Metal (IV) tetra-amidinate compounds and their use in vapor deposition
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United States of America Patent
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Dec 29, 2009
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Oct 17, 2006
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Jun 28, 2006
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Abstract
Metal(IV) tetrakis(N,N′-dialkylamidinates) were synthesized and characterized. Exemplary metals include hafnium, zirconium, tantalum, niobium, tungsten, molybdenum, tin and uranium. These compounds are volatile, highly stable thermally, and suitable for vapor deposition of metals and their oxides, nitrides and other compounds.
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