In-situ thin-film deposition method

United States of America Patent

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Dec 29, 2009
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Jul 6, 2006
app pub date
Oct 27, 2005
filing date
Dec 31, 2004

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WONIK IPS CO., LTD.

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H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....

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Inventor Name	Address	# of filed Patents	Total Citations
Park, Young Hoon	Pyungtaek, KR	73	1493
Seo, Tae Wook	Pyungtaek, KR	12	91

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In-situ thin-film deposition method

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United States of America Patent

11260559

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PATENT NO	7638437
APP PUB NO	20060148268A1
SERIAL NO	11260559
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity Expired	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
December 29, 2009	US,7638437,B2 US7638437B2	GRANTED PATENT AS SECOND PUBLICATION
July 06, 2006	US,20060148268,A1 US20060148268A1	FIRST PUBLISHED PATENT APPLICATION

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11260559

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