Liquid metal droplet generator
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United States of America Patent
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Dec 29, 2009
Grant Date -
May 18, 2006
app pub date -
Oct 25, 2005
filing date -
Oct 25, 2004
priority date (Note) -
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Abstract
Small, high velocity liquid metal droplets are produced for applications that require the accurate and remote placement of small quantities of a metal. The magnetic pressure of current flowing through liquid metal is used to force small quantities of liquid metal through an orifice. Examples of applications are to feed metal fuel into plasma extreme ultraviolet sources, and to place solder bumps on an integrated circuit prior to the attachment of connections.
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