Vibration gyro and the process of producing the same
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United States of America Patent
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Dec 29, 2009
Grant Date -
Jan 31, 2008
app pub date -
Mar 12, 2007
filing date -
Mar 14, 2006
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Abstract
An inclination of an inclined surface formed by working a ridge of a resonator is set to be within a predetermined angular range, whereby a leakage of vibration in the out-of-plane direction is reduced, the leakage of vibration being generated according to the detuning degree adjustment. In addition, a single laser beam is irradiated onto the ridge at an incident angle within a predetermined angular range, whereby a simple working on the inclined surface is established for the leakage vibration adjustment. A degree of the leakage vibration of the resonator is determined based on a relationship with the drift amount that is a ratio of the angular velocity change, and the inclination of the inclined surface is set to be within a predetermined angular range, thereby suppressing the drift amount.
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