Microsystem manipulation apparatus
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United States of America Patent
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Dec 22, 2009
Grant Date -
Mar 1, 2007
app pub date -
Jun 16, 2006
filing date -
Jun 16, 2005
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A microsystem manipulation apparatus and an associated kit is described that may be used to facilitate the assembly and testing of Microsystems and microsystem components. The microsystem manipulation apparatus may include a scanning electron microscope imaging system, a stage, and at least one manipulator having an associated tool. The microsystem manipulation apparatus may be partially or fully automated to provide for routine microsystem assembly, disasembly, and/or testing. The associated kit may include one or more manipulators and associated tools for retrofitting an existing scanning electron microscope to produce a microsystem manipulation apparatus.
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