Importance

Loading Importance Indicators...

Abstract

Provided are an X-ray tube and an X-ray analysis apparatus, which can be further reduced in size as well as in weight and more efficiently detect a fluorescent X-ray and the like to increase sensitivity. The X-ray tube includes: a vacuum casing (2) having an interior in a vacuum state and a window section (1) formed of an X-ray transmission film through which an X-ray can be transmitted; an electron beam source (3) provided in the vacuum casing (2), to emit an electron beam (e); a target (T) provided in the vacuum casing (2) to be irradiated with the electron beam (e) to generate a primary X-ray and to be able to emit the generated primary X-ray through the window section (1) to an exterior sample (S); an X-ray detection element (4) provided in the vacuum casing (2) to be able to detect a fluorescent X-ray and a scattered X-ray, which are emitted from the sample (S) to be incident through the window section (1), to output a signal containing energy information of the fluorescent X-ray and the scattered X-ray; and a metal guard member (10) provided between the X-ray detection element (4) and an irradiated area of the target (T) with the electron beam (e).

Loading the Abstract Image...

First Claim