Composite stamper for imprint lithography
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United States of America Patent
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Dec 15, 2009
Grant Date -
Jun 23, 2005
app pub date -
Dec 19, 2003
filing date -
Dec 19, 2003
priority date (Note) -
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Abstract
A stamper having a patterned layer composed of a hard material and a compressible material back plane layer. The back plane layer may be composed of an elastomer. The stamper may be used to imprint an embossable layer disposed above a substrate for the production of a magnetic recording disk.
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