Substrate transfer apparatus
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United States of America Patent
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Dec 15, 2009
Grant Date -
Jul 30, 2009
app pub date -
Nov 26, 2008
filing date -
Jan 28, 2008
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A substrate transfer apparatus that is designed provide an inclined transfer function that improves liquid saving efficiency of a process solution (developing solution) during the transfer of the substrate. The substrate transfer apparatus includes a first transfer unit for transferring a substrate, a second transfer unit spaced apart from an end of the first transfer unit, a third transfer unit disposed between the first and second transfer units and providing an inclined transfer that is capable of saving a developing solution adhered to the substrate during transfer of the substrate, and a transfer controller for controlling an inclined transfer angle and a connection state of the third transfer unit.
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