Use of anti-reflective seed layers for the fabrication of perpendicular thin film heads
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United States of America Patent
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Dec 15, 2009
Grant Date -
May 15, 2008
app pub date -
Nov 10, 2006
filing date -
Nov 10, 2006
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Abstract
Methods and structures for the fabrication of perpendicular thin film heads are disclosed. Prior to the deposition of shield structures, seed layers having anti-reflective properties are utilized, eliminating the need to deposit, then remove, traditional inorganic anti-reflection coatings prior to shield plating.
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