Surface finish roughness measurement

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United States of America Patent

PATENT NO 7630086
APP PUB NO 20070115483A1
SERIAL NO

11623415

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A method comprises generating a data set comprising first surface roughness data from a first orientation and second surface roughness data from a second orientation and determining a roughness bias parameter from the first surface roughness data and the second surface roughness data.

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Patent Owner(s)

  • KLA-TENCOR CORPORATION;KLA-TENCOR TECHNOLOGIES CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Do, Tri Fremont , US 2 24
Meeks, Steven W Fremont , US 72 1023
Oak, Dave S San Francisco , US 1 18
Soetarman, Ronny Fremont , US 31 478
Velidandla, Vamsi San Jose , US 7 52

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