Fabrication method of semiconductor luminescent device

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United States of America Patent

PATENT NO 7629187
APP PUB NO 20070166961A1
SERIAL NO

11651488

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Abstract

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A fabrication method of a semiconductor luminescent device includes forming a compound semiconductor layer having a structure in which a first conductivity-type clad layer, an active layer, a second conductivity-type clad layer are layered in order on a substrate, the second conductivity-type being different from the first conductivity-type and forming a low-refractive-index region in a waveguide in an area to be an end face from which an output light from the waveguide in the compound semiconductor layer is emitted, the low-refractive-index region having an equivalent refractive-index lower than that of another area in the waveguide. The step of forming the low-refractive-index region includes determining a width of the low-refractive-index region in a longitudinal direction of the waveguide so that an emission angle of the output light of the semiconductor luminescent device is controlled to be a desirable value, and forming the low-refractive-index region having the width.

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Patent Owner(s)

Patent OwnerAddress
EUDYNA DEVICES INCYAMANASHI PREFECTURE YAMANASHI

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kajiyama, Satoshi Yamanashi , JP 21 139
Sumitomo, Hiroyuki Yamanashi , JP 25 196
Ueda, Makoto Yamanashi , JP 110 1214

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