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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
SHOWA SHINKU CO LTD	3062-10 TANA SAGAMIHARA-SHI KANAGAWA 229-1124

International Classification(s)

• H01J:ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS

• [Classification Symbol]

• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Ito, Makoto	Kanagawa , JP	297	2381
Osada, Yusuke	Kanagawa , JP	1	2
Shiono, Tadahisa	Kanagawa , JP	1	2
Yabe, Yutaka	Kanagawa , JP	1	2

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
December 01, 2009	US,7626180,B2   US7626180B2	GRANTED PATENT AS SECOND PUBLICATION
July 10, 2008	US,20080164820,A1   US20080164820A1	FIRST PUBLISHED PATENT APPLICATION

Full Text

US Patent No: 7626180

Charged particle beam apparatus, method for controlling charged particle, and frequency adjustment apparatus

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