Autofocus system and method for autofocusing an optical imaging instrument
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United States of America Patent
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Dec 1, 2009
Grant Date -
Nov 15, 2007
app pub date -
May 11, 2007
filing date -
May 15, 2006
priority date (Note) -
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Abstract
The invention relates to an autofocus system for an optical instrument (1) that images a specimen (11), having an irradiation optical system (7) for generating an irradiation beam path that generates an autofocus pattern on the specimen (11), the irradiation beam path being directed onto the specimen by means of a deflection element (10), and having an autofocus analysis unit (19) to which is conveyed, by means of a deflection element (15), a detector beam path that encompasses radiation, reflected from the specimen (11), of the irradiation beam path, a micromirror array (20) having individually controllable and adjustable micromirrors being provided in combined fashion as a deflection element (10) for the irradiation beam path and as a deflection element (15) for the detector beam path.
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